We were unable to confidently predict a Total Pay estimate for this role based on limited pay data for similar job titles, employers, locations, and/or years of experience.
Recent salaries shared by System Performance Engineer at ASML
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ASML pay FAQs
The salary trajectory of a a System Performance Engineer ranges between locations and employers. The salary starts at $0 per year (estimate) and goes up to $0 per year (estimate) for the highest level of seniority.
The estimated average salary for a System Performance Engineer at ASML is $16,65,000 per year or $800 per hour, but some professionals have reported earning up to roughly $19,37,500 per year (90th percentile). The typical pay range is between $13,80,000 (25th percentile) and $19,37,500 (75th percentile) annually. This is based on 0 salaries submitted by ASML System Performance Engineer professionals on Glassdoor, as of Jul 2026.